Thin Solid Films · 1998 · 53 citations · 10 references
Chemical EngineeringEngineeringPhotochemistrySurface SciencePhoto-induced CvdThin FilmsChemical Vapor DepositionThin Film Processing
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Sputtered Ta2O5 antireflection coatings for silicon solar cells
Francisco Rubio, J.P. Denis, J.M. Albella et al. · Thin Solid Films · 1982 · 103 citations