The interface between silicon and a high-k oxide - Concepedia

Concepedia

Publication | Open Access

The interface between silicon and a high-k oxide

DOI Full Paper Access

303

Citations

19

References

2003

Year

Clemens J. Först, C. Ashman, Karlheinz Schwarz, Peter E. Blöchl

High-k OxideOxide ElectronicsApplied PhysicsSemiconductor Device FabricationSilicon On Insulator

References

	Year	Citations

Page 1