Concepedia

Publication | Closed Access

Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating

DOI

29

Citations

16

References

2014

Year

Jae Hyung Park, Dae-Yong Moon, Dong-Suk Han, Yujin Kang, Sora Shin, Hyung-Tag Jeon, Jong‐Wan Park
Surface and Coatings Technology

References

YearCitations

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