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Positron trapping at vacancies in electron-irradiated Si at low temperatures
119
Citations
45
References
1989
Year
Positron TrappingExperimental ResultsLow TemperaturesEngineeringPhysicsPositron Annihilation SpectroscopyIntrinsic ImpurityApplied PhysicsCondensed Matter PhysicsDifferent Temperature BehaviorsAtomic PhysicsSemiconductor MaterialSemiconductor Device FabricationVacuum DeviceSilicon On InsulatorIon Emission
Experimental results on positron trapping at vacancies in electron-irradiated silicon are presented. The positron lifetimes 273\ifmmode\pm\else\textpm\fi{}3 and 248\ifmmode\pm\else\textpm\fi{}2 ps in pure Si and heavily-phosphorus-doped Si ([P]=${10}^{20}$ ${\mathrm{cm}}^{\mathrm{\ensuremath{-}}3}$) are assigned to a negative monovacancy ${V}^{\mathrm{\ensuremath{-}}}$ and a negative vacancy-phosphorus pair (V-P${)}^{\mathrm{\ensuremath{-}}}$, respectively. In pure Si, positron trapping displays a strong negative temperature dependence, and the specific trapping rate reaches very large values ${(10}^{17--}$${10}^{18}$ ${\mathrm{s}}^{\mathrm{\ensuremath{-}}1}$) at low temperatures. In Si:P the trapping rate is independent of temperature. These different temperature behaviors are attributed to different positron-trapping mechanisms, a cascade of one-phonon transitions in pure Si, and an Auger process in Si:P.
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