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Subsurface defects characterization and laser damage performance of fused silica optics during HF-etched process

Materials SciencePhotonicsLaser OpticsOptical MaterialsLaser Damage PerformanceEngineeringAdvanced Laser ProcessingOptical PropertiesLaser-induced BreakdownApplied PhysicsLaser ApplicationsLaser Processing TechnologyLaser-assisted DepositionSubsurface Defects CharacterizationHf-etched ProcessLaser Damage