Publication | Closed Access
Self-limiting growth of GaAs with doping by molecular layer epitaxy using triethyl-gallium and AsH3
11
Citations
11
References
2002
Year
Materials ScienceSelf-limiting GrowthEngineeringApplied PhysicsMolecular Layer EpitaxyMolecular Beam EpitaxyEpitaxial GrowthOptoelectronicsCompound Semiconductor
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