Synthesis of SiO2 and SiOxCyHz thin films by microwave plasma CVD - Concepedia

Concepedia

Publication | Closed Access

Synthesis of SiO2 and SiOxCyHz thin films by microwave plasma CVD

55

Citations

14

References

2001

Year

Ángel Barranco, J. Cotrino, F. Yubero, J.P. Espinós, José J. Benı́tez, C. Clerc, Agustín R. González‐Elipe

Thin Solid Films

Materials EngineeringMaterials ScienceEngineeringSioxcyhz Thin FilmsPlasma CvdApplied PhysicsThin FilmsChemical Vapor DepositionPlasma ProcessingThin Film Processing

References

	Year	Citations

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