Publication | Closed Access
Defect formation in amorphous SiO2 by ion implantation: Electronic excitation effects and chemical effects
27
Citations
11
References
1998
Year
Materials ScienceAmorphous Sio2Ion ImplantationEngineeringApplied PhysicsDefect FormationSemiconductor Device FabricationAmorphous SolidSilicon On Insulator
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