Detailed Study of Amplitude Nonlinearity in Piezoresistive Force Sensors

Abstract

This article upgrades the RC linear model presented for piezoresistive force sensors. Amplitude nonlinearity is found in sensor conductance, and a characteristic equation is formulated for modeling its response under DC-driving voltages below 1 V. The feasibility of such equation is tested on four FlexiForce model A201-100 piezoresistive sensors by varying the sourcing voltage and the applied forces. Since the characteristic equation proves to be valid, a method is presented for obtaining a specific sensitivity in sensor response by calculating the appropriate sourcing voltage and feedback resistor in the driving circuit; this provides plug-and-play capabilities to the device and reduces the start-up time of new applications where piezoresistive devices are to be used. Finally, a method for bypassing the amplitude nonlinearity is presented with the aim of reading sensor capacitance.