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Influence of hydrogen dilution on structural, electrical and optical properties of hydrogenated nanocrystalline silicon (nc-Si:H) thin films prepared by plasma enhanced chemical vapour deposition (PE-CVD)

Electrical EngineeringEngineeringNanoelectronicsOptical PropertiesSilicon On InsulatorApplied PhysicsHydrogen DilutionChemical Vapor DepositionHydrogenThin FilmsHydrogenated Nanocrystalline SiliconPlasma ProcessingPhotovoltaicsThin Film Processing