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Effect of high substrate bias and hydrogen and nitrogen incorporation on spectroscopic ellipsometric and atomic force microscopic studies of tetrahedral amorphous carbon films

Materials ScienceHigh Substrate BiasEngineeringGlassy CarbonNanomaterialsNanotechnologyCarbon-based MaterialSurface ScienceApplied PhysicsChemistryAmorphous SolidNitrogen IncorporationSpectroscopic EllipsometricThin Film Processing