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Temperature dependence of mobility and carrier density in InN films
41
Citations
37
References
2006
Year
Materials ScienceSemiconductorsEpitaxial GrowthEngineeringPhysicsCrystalline DefectsInn FilmsApplied PhysicsCondensed Matter PhysicsTemperature DependenceSemiconductor MaterialThin FilmsMolecular Beam EpitaxyThin Inn FilmsCharge Carrier TransportCarrier Density NeThin Film Processing
We investigate the temperature dependence of Hall mobility μ and carrier density Ne for thin InN films grown by molecular-beam epitaxy and plasma source molecular-beam epitaxy over three orders-of-magnitude difference in their carrier density: for the low-density film Ne=5.8×1017∕cm3 and for the high-density film Ne=3.2×1020∕cm3. In both the films, for temperature up to 300 K, a large temperature-independent concentration of carriers is observed. For higher temperatures, however, carrier density increases with temperature. The characteristic behavior of the mobility for the low-density film is different from that of the high-density film, particularly for temperatures less than 300 K. The low-density film shows a peak behavior in the mobility around 250 K in contrast to the temperature-independent mobility observed for the high-density film for T<300K. We investigate theoretically the concentrations of donor, acceptor, and threading dislocations for both the films and also discussed various electron-scattering mechanisms which contribute to the mobility in these films.
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