Effect of plasma treatments on a porous low-k material – Study of pore sealing - Concepedia

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Effect of plasma treatments on a porous low-k material – Study of pore sealing

31

Citations

19

References

2007

Year

W. Puyrenier, V. Rouessac, Lucile Broussous, Diane Rébiscoul, A. Ayral

Microporous and Mesoporous Materials

Materials SciencePore SealingPorous MembranePorous BodyPorosityPlasma TreatmentsPlasma Processing

References

	Year	Citations

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