Efficient polarization beam splitter pixels based on a dielectric metasurface

Abstract

The polarization dependence of the reflection, refraction, and diffraction of electromagnetic waves from materials is measured in applications that extend from small (e.g., ellipsometry of semiconductor chips) to large scales (e.g., remote sensing for planetary science and weather radar). Such applications employ polarimeters that are in turn based on devices with polarization-selective absorption or reflection/refraction properties (e.g., prisms). The latter devices are generally bulky, thereby limiting their integration into compact systems. The former devices are inherently lossy, as they function by absorbing the unwanted polarization. Here, we experimentally demonstrate a conceptually novel method for pixellevel polarimetry. Each pixel contains amorphous-silicon nanoridges and deflects incident light in a polarizationdependent manner. As photons are sorted by polarization rather than filtered, the approach permits high efficiency. A high transmission efficiency of 90% and a high extinction ratio of 15 times are demonstrated.