Chemical bonds and microstructure in nearly stoichiometric PECVD aSixNyHz - Concepedia

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Chemical bonds and microstructure in nearly stoichiometric PECVD aSixNyHz

20

Citations

17

References

1995

Year

C. Savall, J.C. Bruyère, J.P. Stoquert

Thin Solid Films

Materials ScienceChemical BondsChemical BondChemistryCrystal Structure Design

References

	Year	Citations

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