Journal of Nuclear Materials · 2013 · 12 citations · 6 references
Natural SciencesElectrical EngineeringPhysicsMicroelectronicsPlasma PhysicsSemiconductor DevicesHigh-temperature PlasmasPlasma DiagnosticsPlasma SheathsPlasma SourcesPlasma Surface TreatmentPlasma-surface InteractionsGlow DischargesPlasma CleaningPlasma OxidationPlasma ProcessesRadio-frequency Discharges
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F. Gnesotto, P. Sonato, William R. Baker et al. · Fusion Engineering and Design · 1995 · 72 citations · Full text