Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses

Abstract

Nanobumps and nanoholes have been formed in gold and silver films with various thicknesses on a dielectric substrate by strongly focused single nanosecond pulses of a Nd:YAG laser. An apertureless dielectric fiber probe and an aspherical lens with a numerical aperture of 0.5 were used to focus laser radiation into a diffraction-limited spot on the surface of gold and silver films, respectively. Atomic force and electron microscopy studies have demonstrated that the shape and dimension of nanostructures, as well as the threshold parameters of laser radiation for their formation, are determined by the thickness of a modified film (“size effect”) and by the duration of a laser pulse owing to the lateral heat conduction in films (nonlocal energy deposition effect). Mechanisms of the dynamic formation of such structures in metallic films by nanosecond laser pulses due to phase transformations of their material have been discussed.