The role of subsurface oxygen in the local oxidation of zirconium and zirconium nitride thin films - Concepedia

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The role of subsurface oxygen in the local oxidation of zirconium and zirconium nitride thin films

11

Citations

29

References

2004

Year

Natalia Farkas, G. Zhang, Karen Donnelly, Edward A. Evans, R. D. Ramsier, John A. Dagata

Thin Solid Films

Materials ScienceEngineeringOxidation ResistanceOxide ElectronicsSurface ScienceApplied PhysicsSubsurface OxygenThin FilmsLocal OxidationChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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