Publication | Closed Access
Catalytic conversion of silicon tetrachloride to trichlorosilane for a poly-Si process
33
Citations
13
References
2012
Year
Materials ScienceMolecular SieveChemical EngineeringEngineeringMolecular SievingSilicon TetrachlorideCatalytic SynthesisCatalysisCatalytic ConversionChemistryPoly-si Process
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