AES study of the low-pressure oxidation of Si(100): Electron beam effects - Concepedia

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AES study of the low-pressure oxidation of Si(100): Electron beam effects

34

Citations

9

References

1983

Year

B. Carrière, A. Chouiyakh, Bernard Lang

Surface Science

Electrical EngineeringIon ImplantationEngineeringElectron Beam EffectsApplied PhysicsLow-pressure OxidationIon BeamAes StudyIon EmissionSilicon On Insulator

References

	Year	Citations

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