Physical review. B, Condensed matter · 1983 · 255 citations · 22 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsElectronic MaterialsSemiconductor MaterialsDefects In Electronic MaterialsDopingSemiconductor DefectsSemiconductor InterfacesSemiconductor PhysicsWide Band Gap SemiconductorsDeep-level DefectsDefect Energy LevelsDefect Levels In SemiconductorsImpuritiesImpurity DefectsImpurity StatesIon Implantation EffectsSemiconductor Doping
The major chemical trends in the energy levels of $s{p}^{3}$-bonded substitutional deep impurities in the wurtzite semiconductors AIN, CdS, CdSe, ZnS, and ZnO are predicted. N impurities (deposited on the anion site by ion implantation) appear to be candidates for producing shallow $p$-type dopants in these materials.
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