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Molybdenum-containing carbon films deposited using the screen grid technique in an electron cyclotron resonance chemical vapor deposition system

Materials ScienceChemical EngineeringEngineeringCarbon-based MaterialSurface ScienceApplied PhysicsScreen Grid TechniqueMolybdenum-containing Carbon FilmsChemical DepositionCarbon-based FilmsChemical Vapor DepositionThin Film Processing