Very High Frequency Glow Discharge: Plasma- and Deposition Aspects

H. Keppner, U. Kroll, J. Meier, Amit B. Shah

Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1995 · 31 citations · 0 references

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Note: IMT-NE Number: 202 Reference PV-LAB-ARTICLE-1995-007doi:10.4028/www.scientific.net/SSP.44-46.97 Record created on 2009-02-10, modified on 2017-05-10