Applied Optics · 1993 · 315 citations · 4 references
EngineeringManufacturing EngineeringMetrologySurface EngineeringSurface ScienceInterferometryOptical MetrologySurface CharacterizationSurface MetrologySurface RoughnessSurface TopographyNoncontact Surface MeasurementOptical InterferometryOptical ProfilometryOptical Surface ProfilometryProfilometrySurface Profile MeasurementSurface ProfilingSurface Profilometry
Conventional interferometric surface profiling is limited by phase ambiguity on steep slopes, while other optical methods suffer from poor resolution and speed, and contact stylus profilometers are slow and can damage delicate surfaces. The authors propose a new optical, noncontact method for profiling rough surfaces. The method employs interferometric techniques combined with digital signal‑processing algorithms to deliver fast, accurate, and repeatable three‑dimensional surface profiles.
Conventional interferometric methods of surface profiling are limited in the magnitude of surface height that can be accurately measured because of phase ambiguity errors on steep local slopes. Other optical methods that have been developed for surface profiling frequency suffer from poor height resolution and low measurement speed for three-dimensional profiles. Contact profilometers such as stylus-based instruments suffer from slow measurement speed, especially when three-dimensional profiles of the surface are required. Stylus tips can also scratch delicate surfaces duringthe course ofthe measurement. A new method of optical, noncontact profiling of rough surfaces is described that utilizes interferometric techniques as well as digital signal-processing algorithms to produce fast, accurate, and repeatable three-dimensional surface profile measurements.
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G. S. Kino, Stanley S. C. Chim · Applied Optics · 1990 · 400 citations
Multiple-wavelength phase-shifting interferometry
Yeou-Yen Cheng, James C. Wyant · Applied Optics · 1985 · 309 citations