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Influence of substrate temperature and post-treatment on the properties of ZnO:Al thin films prepared by pulsed laser deposition

Materials ScienceAluminium NitrideEngineeringOxide ElectronicsSubstrate TemperatureApplied PhysicsLaser DepositionLaser-assisted DepositionThin FilmsPulsed Laser DepositionAl Thin FilmsThin Film Processing