Publication | Closed Access

Relationships between material properties of piezo-electric thin films and device characteristics of film bulk acoustic resonators

Materials ScienceMaterial PropertiesEngineeringAcoustic MetamaterialApplied PhysicsAcoustic MaterialPiezo-electric Thin FilmsDevice CharacteristicsPiezoelectricityPiezoelectric MaterialThin FilmsUltrasoundMicromachined Ultrasonic Transducer