Growth of diamond at room temperature by an ion-beam sputter deposition under hydrogen-ion bombardment

Abstract

The structure and crystal phase of carbon films prepared by an ion-beam sputter deposition were studied. The properties of the deposited carbon films were influenced by a hydrogen-ion bombardment during the film growth. It is noted that the hydrogen-ion bombardment activates the growth of diamond in the deposited carbon film. Diamond particles of 0.1∼1 μm in diameter, which showed well-defined morphology of diamond, were successfully grown at room temperature on nondiamond substrates.