Thin Solid Films · 2004 · 29 citations · 13 references
Natural SciencesChemistryMaterials ScienceMetallic MaterialsSurface ScienceThin FilmsChemical Vapor DepositionCoatingsThin-film DepositionThin-film MaterialsChemical Vapor Deposition MaterialsChemical Vapor Deposition PrecursorsMetal Thin FilmsMetal-organic Chemical Vapor DepositionMetallic Thin FilmsMetalorganic Chemical Vapor Deposition
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D. A. Edwards, Robert M. Harker, Mary F. Mahon et al. · Inorganica Chimica Acta · 2002 · 69 citations