Japanese Journal of Applied Physics · 1987 · 19 citations · 8 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface ChemistrySurface ScienceThin FilmsCoating ProcessesCoating TechnologyCoatingsSurface CoatingsThin Film DiffusionThin-film DepositionCoating CharacterizationDiffusion EquationDiffusion Equation ModelsEvaporation ConcentrationFilm ThicknessFilm Thickness ControlSpin CoatingThin Film Wetting
The effect of solvent evaporation on the film thickness produced by the spin-coating process is expressed as a function of concentration of solvent. This function is inserted into the equation for the film thickness. The equation obtained gives its analytical solution, which depends on time and the concentration. The concentration is obtained from the diffusion equation. Thus, a more detailed analysis of solvent evaporation becomes possible than before. As an application, the experimental dry film thickness of Jeneckhe is analyzed and a comparison is made with his model.
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