Ferroelectrics · 2002 · 18 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsCoatingsThin Film Surface MorphologyThin-film DepositionThin-film MaterialsCrystal Preferred OrientationCrystallization In Thin FilmsCrystallographic Preferred OrientationPreferred OrientationSiliconSilicon Thin FilmsSpin CoatingX-ray Diffraction Analysis
Polymeric precursor solution (Pechini method) was used to deposit LiNbO 3 thin films by spin-coating on (100) silicon substrates. X-ray diffraction data of thin films showed that the increase of oxygen flow promotes a preferred orientation of (001) LiNbO 3 planes parallel to the substrate surface. Surface roughness and grain size, observed by atomic force microscopy, change also with oxygen flow.