Publication | Closed Access
The effect of the recess shape on performance analysis of the gas-lubricated bearing in optical lithography
141
Citations
8
References
2005
Year
Recess ShapeEngineeringBeam LithographyHydrodynamic LubricationMicrofabricationMechanical EngineeringApplied PhysicsOptical LithographyPiston-ring LubricationTribological PropertyGas-lubricated BearingNanolithography Method
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