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Surface- and microanalytical characterization of silicon-carbonitride thin films prepared by means of radio-frequency magnetron co-sputtering

Materials ScienceRadio-frequency Magnetron Co-sputteringMicroanalytical CharacterizationEngineeringCarbon-based MaterialSurface ScienceApplied PhysicsSilicon-carbonitride Thin FilmsThin FilmsMicroelectronicsCarbon-based FilmsChemical Vapor DepositionThin Film Processing