Publication | Closed Access

Reduction of interface traps at the amorphous-silicon/crystalline-silicon interface by hydrogen and nitrogen annealing

EngineeringPhysicsNanoelectronicsSilicon DebuggingSurface ScienceApplied PhysicsAmorphous-silicon/crystalline-silicon InterfaceSemiconductor Device FabricationAmorphous SolidSilicon On InsulatorMicroelectronicsInterface TrapsNitrogen AnnealingSemiconductor Device