Publication | Closed Access
On the porosity of TiN films deposited by HCD ion plating
11
Citations
13
References
2002
Year
Materials ScienceMaterials EngineeringTin FilmsSurface CharacterizationEngineeringSurface ScienceApplied PhysicsChemical Vapor DepositionThin FilmsChemical DepositionHcd IonThin Film Processing
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