Publication | Closed Access
Requirements of PECVD SiNx:H layers for bulk passivation of mc-Si
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Citations
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References
2006
Year
Materials EngineeringElectrical EngineeringWafer Scale ProcessingEngineeringEpitaxial GrowthApplied PhysicsSemiconductor Device FabricationElectronic PackagingPecvd SinxMicroelectronicsSilicon On InsulatorInterconnect (Integrated Circuits)
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