Fiber optics sensor for sub-nanometric displacement and wide bandwidth systems

Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope

Ichiko Misumi, Satoshi Gonda, Tomizo Kurosawa et al. · Measurement Science and Technology · 2003 · 109 citations

Engineering, Materials Science, Instrumentation +16

A fiber-optic interferometer with subpicometer resolution for dc and low-frequency displacement measurement

D. T. Smith, Jon R. Pratt, L Howard · Review of Scientific Instruments · 2009 · 93 citations

Engineering, Electrical Engineering, Optics +16

Metrological errors in optical encoders

Luis Miguel Sanchez‐Brea, Tomás Morlanes · Measurement Science and Technology · 2008 · 81 citations

Engineering, Electrical Engineering, Mechatronics Engineering +17

Reflective optical sensor for long-range and high-resolution displacements

Christine Prelle, Frédéric Lamarque, Philippe Revel · Sensors and Actuators A Physical · 2006 · 68 citations · Full text

Engineering, Physics, Optics +13

The performance of a fiber optic displacement sensor for different types of probes and targets

M. Yasin, Sulaiman Wadi Harun, H.A. Abdul-Rashid et al. · Laser Physics Letters · 2007 · 54 citations

Engineering, Materials Science, Microelectromechanical Systems +16