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High-<i>T</i> <i>c</i> superconductor/normal-metal/superconductor edge junctions and SQUIDs with integrated groundplanes
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1996
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Integrated GroundplanesSuperconducting MaterialEngineeringBismuth-based SuperconductorsHigh-tc Superconductor/normal-metal/superconductorInterconnect (Integrated Circuits)Sns SquidsNovel SuperconductorsSuperconductivityQuantum MaterialsHigh Tc SuperconductorsSuperconducting DevicesMaterials ScienceSns Edge JunctionsElectrical EngineeringHigh-tc SuperconductivityPhysicsHigh-temperature SuperconductivityApplied PhysicsCondensed Matter PhysicsQuantum Superconductivity
Epitaxial, high-Tc superconductor/normal-metal/superconductor (SNS) edge-geometry weak links and superconducting quantum interference devices (SQUIDs) have been fabricated with integrated YBa2Cu3O7 (YBCO) groundplanes and SrTiO3 insulators, using a process which incorporates six epitaxial layers. The SNS edge junctions were produced using off-axis sputtered films and Co-doped-YBCO normal metal interlayers. These devices show excellent performance with typical critical current-resistance (IcRn) products of 500–800 μV for 100–150 Å thick normal metal layers at 65 K, and 1-σ critical current density ( Jc) spreads as small as 12%. SNS SQUIDs incorporating groundplanes exhibit voltage modulation of up to 130 μV at 65 K and 40 μV at 77 K. SQUID inductance measurements indicate microstrip inductance values of 1 pH per square at 65 K.