AlN films prepared on 6H–SiC substrates under various sputtering pressures by RF reactive magnetron sputtering - Concepedia

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AlN films prepared on 6H–SiC substrates under various sputtering pressures by RF reactive magnetron sputtering

33

Citations

34

References

2012

Year

Xu-Ping Kuang, Huayu Zhang, Gui‐Gen Wang, Lin Cui, Can Zhu, Lei Jin, Rui Sun, Jiecai Han

Applied Surface Science

Materials EngineeringMaterials ScienceAluminium NitrideEngineeringApplied PhysicsThin Film Process TechnologyThin FilmsThin Film ProcessingAln Films

References

	Year	Citations

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