The chemisorption of chlorosilanes and chlorine on Si(111)7 × 7 - Concepedia

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The chemisorption of chlorosilanes and chlorine on Si(111)7 × 7

143

Citations

17

References

1990

Year

L. J. Whitman, Stephen A. Joyce, J. A. Yarmoff, F. R. McFeely, L. J. Terminello

Surface Science

Inorganic ChemistryChemical EngineeringEngineeringSurface ChemistrySurface ScienceChemisorptionPhysical ChemistryChemistryHalogenationChemical KineticsSurface Reactivity

References

	Year	Citations

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