Publication | Closed Access

Reliability- and performance-based robust design optimization of MEMS structures considering technological uncertainties

Reliability EngineeringEngineeringHardware ReliabilityMechanical SystemsComputer EngineeringDynamic ReliabilitySystems EngineeringTechnological UncertaintiesStructural ReliabilityMems StructuresStructural OptimizationStructural MechanicsMicroelectronicsRobust DesignMicro-electromechanical SystemTopology Optimization