Publication | Closed Access
Structure and electrical properties of thin copper films deposited by MOCVD
15
Citations
4
References
1995
Year
Materials ScienceElectrical EngineeringMaterial AnalysisEngineeringThin Copper FilmsNanoelectronicsSurface ScienceApplied PhysicsThin FilmsChemical DepositionElectrical PropertiesChemical Vapor DepositionThin Film ProcessingElectrical Insulation
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