Nitridation of Sio2thin films in low ammonia pressures: An AES, SIMS, XPS and Raman spectroscopy investigation - Concepedia

Concepedia

Publication | Closed Access

Nitridation of Sio2thin films in low ammonia pressures: An AES, SIMS, XPS and Raman spectroscopy investigation

20

Citations

38

References

1988

Year

A. Glachant, B. Balland, A. Ronda, J.C. Bureau, C. Plossu

Surface Science

Ii-vi SemiconductorEngineeringNanotechnologyLow Ammonia PressuresSurface ScienceApplied PhysicsSiliceneChemistryThin FilmsSilicon On InsulatorSio2thin FilmsChemical Vapor Deposition

References

	Year	Citations

Page 1