Nitridation of Sio2thin films in low ammonia pressures: An AES, SIMS, XPS and Raman spectroscopy investigation

Practical surface analysis by auger and X-ray photoelectron spectroscopy

P. Oelhafen · Journal of Electron Spectroscopy and Related Phenomena · 1984 · 2.5K citations

Natural Sciences, Materials Engineering, Materials Science +14

Multiphonon Raman Spectrum of Silicon

P. A. Temple, C. E. Hathaway · Physical review. B, Solid state · 1973 · 682 citations

Natural Sciences, Materials Science, Physics +12

Two-Particle Collisions. I. General Relations for Collisions in the Laboratory System

M. Gryziṅski · Physical Review · 1965 · 589 citations

Natural Sciences, Physics, Nuclear Physics +16

Raman and IR absorption spectroscopic studies on α, β, and amorphous Si3N4

Noriyuki Wada, S. A. Solin, Joe Wong et al. · Journal of Non-Crystalline Solids · 1981 · 286 citations

Natural Sciences, Chemistry, Materials Science +14

Surface Oxidation of Silicon Nitride Films

S. I. Raider, R. Flitsch, J. A. Aboaf et al. · Journal of The Electrochemical Society · 1976 · 249 citations

Natural Sciences, Chemistry, Materials Science +17