Publication | Closed Access
Influence of the experimental conditions on the morphology of CVD AIN films
32
Citations
12
References
1993
Year
Materials EngineeringMaterials ScienceEngineeringCvd Ain FilmsSurface ScienceApplied PhysicsThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingExperimental Conditions
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