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a-Si:C:H and a-Si:N:H Thin Films Obtained by PECVD for Applications in Silicon Solar Cells

Materials ScienceElectrical EngineeringEngineeringSilicon On InsulatorApplied PhysicsSilicon Solar CellsSemiconductor Device FabricationThin FilmsChemical Vapor DepositionSolar CellsH Thin FilmsPhotovoltaicsThin Film Processing