Ferroelectric lead barium zirconate thin film of high fatigue resistance

Abstract

Highly (100)-textured lead barium zirconate (PBZ) thin films of ∼0.1 μm and with a composition of (Pb0.742+Ba0.262+)(Pb0.154+ Zr0.854+)O3 were grown on LaNiO3/Pt/Ti electrode-coated Si by rf magnetron sputtering at 500 °C. The Pt/PBZ/LaNiO3 capacitor shows a hysteresis loop with remanent polarization, Pr, of 12 μC/cm2 and coercive field of 185 kV/cm at an applied voltage of 10 V, along with a dielectric constant of 270. More importantly, it has a high fatigue resistance against polarization switching up to 1011 cycles.