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Electrohydrodynamic atomization deposition of PZT sol–gel slurry and sol infiltration on the films

Materials ScienceMaterials EngineeringEngineeringSol InfiltrationApplied PhysicsInterfacial PhenomenaChemical Vapor DepositionThin FilmsChemical DepositionElectrohydrodynamic Atomization DepositionPzt Sol–gel SlurrySol-gel Synthesis