Yttrium sesquioxide, Y2O3, thin films deposited on Si by ion beam sputtering: microstructure and dielectric properties - Concepedia

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Yttrium sesquioxide, Y2O3, thin films deposited on Si by ion beam sputtering: microstructure and dielectric properties

46

Citations

5

References

2001

Year

R.J. Gaboriaud, F. Pailloux, P. Guérin, F. Paumier

Thin Solid Films

Materials EngineeringMaterials ScienceEpitaxial GrowthEngineeringOxide ElectronicsSurface ScienceApplied PhysicsIon Beam SputteringThin FilmsYttrium SesquioxideMolecular Beam EpitaxyThin Film Processing

References

	Year	Citations

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