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Comparative study of Si(111), silicon oxide, SiC and Si3N4 surfaces by secondary ion mass spectroscopy (SIMS)

Materials ScienceSi3n4 SurfacesSurface CharacterizationEngineeringSurface AnalysisSurface ScienceApplied PhysicsSiliceneSilicon OxideSemiconductor Device FabricationSilicon On InsulatorComparative Study