Influence of low energy ion implantation on mechanical properties of magnetron sputtered metastable (Cr,Al)N thin films - Concepedia

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Influence of low energy ion implantation on mechanical properties of magnetron sputtered metastable (Cr,Al)N thin films

62

Citations

17

References

2003

Year

S. Ulrich, H. Holleck, J Ye, H. Leiste, R. Loos, Michael Stüber, P. Pesch, S. Sattel

Thin Solid Films

Materials ScienceMagnetismIon ImplantationMaterial AnalysisEngineeringMechanical PropertiesN Thin FilmsMechanical EngineeringApplied PhysicsThin FilmsEpitaxial GrowthThin Film ProcessingMicrostructure

References

	Year	Citations

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