Application of Reutilization Technology to Calcium Fluoride Sludge from Semiconductor Manufacturers

Abstract

Glass ceramics were prepared from mixtures of wastes generated from refining of waste glass and semiconductor industrial wastewater sludge. The aim is then indeed to study the possible use and effects of integrating calcium fluoride (CaF2) as present in semiconductor wastewater sludge in the silica (glass) melts. CaF2 sludge was blended with a conditioner according to characteristics of the target. Calcium oxide-silicon dioxide-aluminum oxide system glass ceramics have relatively high melting points. Addition of CaF2 sludge to fluxes can significantly reduce the melting point and hence improve the kinetics of the reactions. CaF2 sludge and waste glass were co-melted in various ratios to elucidate their interactions at various heating temperatures. The results indicate that the lowest melting temperature was 1163 degrees C, obtained for the CaF2 sludge-waste glass mixture at a ratio 6:4 (wt:wt), which is significantly lower than that of CaF2 sludge (1378 degrees C). The benefits of using melting to dispose of sludge are the reduction of waste and the fixation of heavy metals. Heat treatment was used to convert the obtained glass into glass ceramics. Heavy metal leaching tests revealed that melting conditions lowered the heavy metal concentrations in the leachate to an order of magnitude lower than that in the sludge. Consequently, industrial sludge can be safely used as a fine aggregate material for a potentially wide range of construction applications.